Ziqiang Qu

According to our database, Ziqiang Qu authored at least 4 papers between 2020 and 2024.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

2024

A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range.

Ziqiang Qu, Hao Ouyang, Wen Xiong, Qiangwei Xu, Yuan Wang, Huafeng Liu

IEEE Trans. Ind. Electron., June, 2024

2023

An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz^1/2.

Shimin Jiao, Hao Ouyang, Ziqiang Qu, Qiu Wang, Huafeng Liu, Liang Cheng Tu

Proceedings of the 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2023

2020

An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer.

Xiaoxiao Song, Huafeng Liu, Yanyan Fang, Chun Zhao, Ziqiang Qu, Qiu Wang, Liang Cheng Tu

Sensors, 2020

A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining.

Ziqiang Qu, Huafeng Liu, Hao Ouyang, Chenyuan Hu, Liang Cheng Tu

Proceedings of the 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020, 2020