Alexey Yu. Illarionov
According to our database1,
Alexey Yu. Illarionov
authored at least 5 papers
between 2012 and 2014.
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Bibliography
2014
Exploring the limits of scanning electron microscopy for the metrology of critical dimensions of photoresist structures in the nanometer range.
Microelectron. Reliab., 2014
Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields.
Microelectron. Reliab., 2014
Monte Carlo modeling of the extraction of roughness parameters at nanometer scale by Critical Dimension Scanning Electron Microscopy.
Proceedings of the 44th European Solid State Device Research Conference, 2014
2013
Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications.
Microelectron. Reliab., 2013
2012
Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies.
Microelectron. Reliab., 2012