Emre Ilgünsatiroglu

According to our database, Emre Ilgünsatiroglu authored at least 5 papers between 2012 and 2014.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

2014

Exploring the limits of scanning electron microscopy for the metrology of critical dimensions of photoresist structures in the nanometer range.

Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov

Microelectron. Reliab., 2014

Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields.

Mauro Ciappa, Alexey Yu. Illarionov, Emre Ilgünsatiroglu

Microelectron. Reliab., 2014

Monte Carlo modeling of the extraction of roughness parameters at nanometer scale by Critical Dimension Scanning Electron Microscopy.

Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov, F. Filosomi, C. Santini

Proceedings of the 44th European Solid State Device Research Conference, 2014

2013

Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications.

Emre Ilgünsatiroglu, Alexey Yu. Illarionov, Mauro Ciappa

Microelectron. Reliab., 2013

2012

Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies.

Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov

Microelectron. Reliab., 2012