Teruaki Safu

According to our database, Teruaki Safu authored at least 3 papers in 2016.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2016

Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer.

Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida

Microelectron. Reliab., 2016

A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology.

Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida

Proceedings of the 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, 2016

A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology.

Toshifumi Konishi, Teruaki Safu, Katsuyuki Machida, Daisuke Yamane, Masato Sone, Kazuya Masu, Hiroshi Toshiyoshi

Proceedings of the 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016, 2016