Wenlan Jiang

Orcid: 0000-0002-4724-2088

According to our database¹, Wenlan Jiang authored at least 2 papers in 2021.

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2021

Virtual Metrology for Semiconductor Chemical Mechanical Planarization Process Using Wide & Deep Learning.

[DOI]

Proceedings of the ICCPR '21: 10th International Conference on Computing and Pattern Recognition, Shanghai, China, October 15, 2021

Phase Partition Based Virtual Metrology for Material Removal Rate Prediction in Chemical Mechanical Planarization Process.

[DOI]

Proceedings of the Artificial Intelligence - First CAAI International Conference, 2021