Atsushi Yagishita
According to our database1,
Atsushi Yagishita authored at least 2 papers
between 2021 and 2026.
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Bibliography
2026
Sophisticated CMP Technology with In-Line Optical-Thickness Verification for Shallow-Trench-Isolation Formation in GAAFETs with Multilayered Si/SiGe Superlattices.
Int. J. Autom. Technol., May, 2026
2021
Buried nanomagnet realizing high-speed/low-variability silicon spin qubits: implementable in error-correctable large-scale quantum computers.
Proceedings of the 2021 Symposium on VLSI Circuits, Kyoto, Japan, June 13-19, 2021, 2021