Martin Kleindienst

Orcid: 0000-0003-1127-1618

According to our database1, Martin Kleindienst authored at least 3 papers between 2014 and 2021.

Collaborative distances:
  • Dijkstra number2 of five.
  • Erdős number3 of five.

Timeline

Legend:

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PhD thesis 
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Links

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Bibliography

2021
Sliding Mode Control of a Distributed-Parameter Wafer Spin Clean Process.
IEEE Trans. Control. Syst. Technol., 2021

2020
Model-based Temperature Control of a Continuous Flow Heater for Efficient Processing of Silicon Wafers.
Proceedings of the 2020 IEEE Conference on Control Technology and Applications, 2020

2014
An application of computer aided parameter tuning of a super-twisting sliding mode controller.
Proceedings of the 13th International Workshop on Variable Structure Systems, 2014


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