Nobumichi Tamura

Orcid: 0000-0002-3698-2611

According to our database¹, Nobumichi Tamura authored at least 1 paper in 2012.

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2012

Measurement of stresses in Cu and Si around through-silicon via by synchrotron X-ray microdiffraction for 3-dimensional integrated circuits.

[DOI]

Microelectron. Reliab., 2012