Shunyuan Lou
Orcid: 0009-0004-0437-2861
According to our database1,
Shunyuan Lou authored at least 3 papers
between 2024 and 2026.
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Bibliography
2026
A Hybrid Weakly Supervised Approach for enhanced High-Precision SEM Defect Segmentation in Nanoscale Semiconductor Manufacturing.
ACM Trans. Design Autom. Electr. Syst., March, 2026
2024
Explainable prediction of deposited film thickness in IC fabrication with CatBoost and SHapley Additive exPlanations (SHAP) models.
Appl. Intell., January, 2024
Minimizing Labeling, Maximizing Performance: A Novel Approach to Nanoscale Scanning Electron Microscope (SEM) Defect Segmentation.
Proceedings of the 61st ACM/IEEE Design Automation Conference, 2024