Shunyuan Lou

Orcid: 0009-0004-0437-2861

According to our database1, Shunyuan Lou authored at least 3 papers between 2024 and 2026.

Collaborative distances:
  • Dijkstra number2 of four.
  • Erdős number3 of five.

Timeline

Legend:

Book  In proceedings  Article  PhD thesis  Dataset  Other 

Links

On csauthors.net:

Bibliography

2026
A Hybrid Weakly Supervised Approach for enhanced High-Precision SEM Defect Segmentation in Nanoscale Semiconductor Manufacturing.
ACM Trans. Design Autom. Electr. Syst., March, 2026

2024
Explainable prediction of deposited film thickness in IC fabrication with CatBoost and SHapley Additive exPlanations (SHAP) models.
Appl. Intell., January, 2024

Minimizing Labeling, Maximizing Performance: A Novel Approach to Nanoscale Scanning Electron Microscope (SEM) Defect Segmentation.
Proceedings of the 61st ACM/IEEE Design Automation Conference, 2024


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