Daniele Pagano

According to our database, Daniele Pagano authored at least 4 papers between 2013 and 2023.

Collaborative distances:

• Dijkstra number of four.
• Erdős number of four.

2023

Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry.

Umberto Amato, Anestis Antoniadis, Italia De Feis, Domenico Fazio, Caterina Genua, Irène Gijbels, Donatella Granata, Antonino La Magna, Daniele Pagano, Gabriele Tochino, Patrizia Vasquez

Sensors, July, 2023

Modeling Multivariate Relations in Multiblock Semiconductor Manufacturing Data Using Process PLS To Enhance Process Understanding.

Geert H. van Kollenburg, Richard Verhoeven, Mike Holenderski, Nirvana Meratnia, Daniele Pagano

Proceedings of the Winter Simulation Conference, 2023

2013

Prediction of integral type failures in semiconductor manufacturing through classification methods.

Gian Antonio Susto, Seán F. McLoone, Daniele Pagano, Andrea Schirru, Simone Pampuri, Alessandro Beghi

Proceedings of 2013 IEEE 18th Conference on Emerging Technologies & Factory Automation, 2013

A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation.

Gian Antonio Susto, Andrea Schirru, Simone Pampuri, Daniele Pagano, Seán F. McLoone, Alessandro Beghi

Proceedings of the 2013 IEEE International Conference on Automation Science and Engineering, 2013