G. Delie

According to our database, G. Delie authored at least 2 papers between 2024 and 2025.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

2025

Leakage and TDDB Mechanisms in 18 nm Pitch Direct Metal Etch Ru Interconnects with Airgaps.

Alicja Lesniewska, Y. Fang, G. Delie, Philippe Roussel, Koen Van Sever, Emmanuel Chery, O. Varela Pedreira, Ivan Ciofi, S. H. Park, Zsolt Tokei, Kris Croes

Proceedings of the IEEE International Reliability Physics Symposium, 2025

2024

Mitigating Line-Break Defectivity with a Sandwiched TiN or W Layer for Metal Pitch 18 NM Aspect Ratio 6 Semi-Damascene Interconnects.

Anshul Gupta, Shreya Kundu, Stefan Decoster, K. Sah, G. Delie, B. Truijen, Davide Tierno, Giulio Marti, O. Varela Pedreira, B. Kenens, Y. Hermans, C. Adelmann, B. de Wachter, Ivan Ciofi, G. Murdoch, A. Cross, Seongho Park, Zsolt Tokei

Proceedings of the IEEE Symposium on VLSI Technology and Circuits 2024, 2024