Benjamin Uhlig

According to our database, Benjamin Uhlig authored at least 3 papers between 2018 and 2021.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

2021

Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization.

Conrad Guhl, Sascha Bott, I. Can Albayrak, Anne Weitzmann, Robert Krause, Joscha Kappel, Birgit Reinhold, Nan Wu, Michael Zier, Andreas Schüring, Hongwei Ma, Rico Hüselitz, Benjamin Uhlig, Marcus Wislicenus

Proceedings of the International Conference on IC Design and Technology, 2021

2020

BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms.

Betting Wehring, Raik Hoffmann, Lukas Gerlich, Malte Czernohorsky, Benjamin Uhlig, Robert Seidel, Tobias Barchewitz, Frank Schlaphof, Lutz Meinshausen, Christoph Leyens

Proceedings of the 2020 IEEE International Reliability Physics Symposium, 2020

2018

Progress on carbon nanotube BEOL interconnects.

Benjamin Uhlig, Jie Liang, Jaehyun Lee, Raphael Ramos, Abitha Dhavamani, Nicole Nagy, Jean Dijon, Hanako Okuno, Dipankar Kalita, Vihar P. Georgiev, Asen Asenov, Salvatore M. Amoroso, Liping Wang, Campbell Millar, F. Konemann, Bernd Gotsmann, Goncalo Goncalves, Bingan Chen, Reeturaj Pandey, R. Chen, Aida Todri-Sanial

Proceedings of the 2018 Design, Automation & Test in Europe Conference & Exhibition, 2018