Marc M. J. van de Wal

According to our database, Marc M. J. van de Wal authored at least 18 papers between 2001 and 2025.

Collaborative distances:

• Dijkstra number of four.
• Erdős number of four.

2025

Optimal Co-Design of Sensor Placement and State Observer for Lithography Applications.

R. P. P. F. Goetz, Nathan van de Wouw, Tom Oomen, Marc M. J. van de Wal, Bardia Sharif, Hans J. Zwart

Proceedings of the IEEE Conference on Control Technology and Applications, 2025

2021

Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation.

Daniel W. M. Veldman, Rob H. B. Fey, Hans Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer

IEEE Trans. Control. Syst. Technol., 2021

2020

Sensor and Actuator Placement for Proportional Feedback Control in Advection-Diffusion Equations.

Daniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Hendrik Nijmeijer

IEEE Control. Syst. Lett., 2020

2019

Optimal actuator shape design with input and state constraints for a wafer heating application.

Daniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer

Proceedings of the 2019 American Control Conference, 2019

2016

Frequency Response Sensitivity model updating using generic parameters.

M. Dorosti, F. J. M. Heck, Rob H. B. Fey, Marcel François Heertjes, Marc M. J. van de Wal, Henk Nijmeijer

Proceedings of the 2016 American Control Conference, 2016

2014

Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage.

Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch

IEEE Trans. Control. Syst. Technol., 2014

Exploiting additional actuators and sensors for nano-positioning robust motion control.

Robbert van Herpen, Tom Oomen, Edward Kikken, Marc M. J. van de Wal, Wouter H. T. M. Aangenent, Maarten Steinbuch

Proceedings of the American Control Conference, 2014

2013

Enhancing performance through multivariable weighting function design in ℋ- loop-shaping: with application to a motion system.

Frank Boeren, Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra

Proceedings of the American Control Conference, 2013

2012

Next-generation wafer stage motion control: Connecting system identification and robust control.

Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch

Proceedings of the American Control Conference, 2012

2010

Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage.

Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra

Proceedings of the American Control Conference, 2010

2009

Identification for robust inferential control.

Tom Oomen, Okko H. Bosgra, Marc M. J. van de Wal

Proceedings of the 48th IEEE Conference on Decision and Control, 2009

2007

Design framework for high-performance optimal sampled-data control with application to a wafer stage.

Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra

Int. J. Control, 2007

Aliasing of Resonance Phenomena in Sampled-Data Feedback Control Design: Hazards, Modeling, and a Solution.

Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra

Proceedings of the American Control Conference, 2007

2006

Exploiting H∞ Sampled-Data Control Theory for High-Precision Electromechanical Servo Control Design.

Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra

Proceedings of the American Control Conference, 2006

2004

Multi-objective H_∞ control applied to a wafer stage model.

M. J. Zandvliet, Carsten W. Scherer, Camile W. J. Hol, Marc M. J. van de Wal

Proceedings of the 43rd IEEE Conference on Decision and Control, 2004

2003

Model-based feedforward for motion systems.

Matthijs Boerlage, Maarten Steinbuch, Paul F. Lambrechts, Marc M. J. van de Wal

Proceedings of 2003 IEEE Conference on Control Applications, 2003

2001

A review of methods for input/output selection.

Marc M. J. van de Wal, Bram de Jager

Autom., 2001

Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage.

Marc M. J. van de Wal, Gregor van Baars, Frank Sperling, Okko H. Bosgra

Proceedings of the 40th IEEE Conference on Decision and Control, 2001