Marcel François Heertjes

According to our database1, Marcel François Heertjes authored at least 84 papers between 2001 and 2024.

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Bibliography

2024
Unconstrained Parameterization of Stable LPV Input-Output Models: with Application to System Identification.
CoRR, 2024

2023
Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing.
IEEE Trans Autom. Sci. Eng., 2023

A Small-Gain Approach to Incremental Input-to-State Stability Analysis of Hybrid Integrator-Gain Systems.
IEEE Control. Syst. Lett., 2023

Learning for Precision Motion of an Interventional X-ray System: Add-on Physics-Guided Neural Network Feedforward Control.
CoRR, 2023

Motion Orchestration in Dual-Stage Wafer Scanners.
IROS, 2023

Statistical Characterization of Position-Dependent Behavior Using Frequency-Aware B-Spline.
IROS, 2023

An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners.
Proceedings of the IEEE International Conference on Mechatronics, 2023

Direct Learning for Parameter-Varying Feedforward Control: A Neural-Network Approach.
Proceedings of the 62nd IEEE Conference on Decision and Control, 2023

Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective.
Proceedings of the 62nd IEEE Conference on Decision and Control, 2023

Trajectory Generation Using Activator-Inhibitor Systems.
Proceedings of the 62nd IEEE Conference on Decision and Control, 2023

Point-to-Point Motion Trajectory Generation for Uncertain Systems: A Closed-Form Solution.
Proceedings of the American Control Conference, 2023

2022
Neural Network Training Using Closed-Loop Data: Hazards and an Instrumental Variable (IVNN) Solution.
CoRR, 2022

A Discrete-Time Approach to Analysis of Sampled-Data Hybrid Integrator-Gain Systems.
Proceedings of the 61st IEEE Conference on Decision and Control, 2022

Unifying Model-Based and Neural Network Feedforward: Physics-Guided Neural Networks with Linear Autoregressive Dynamics.
Proceedings of the 61st IEEE Conference on Decision and Control, 2022

On Convergence of Systems with Sector-Bounded Hybrid Integrators.
Proceedings of the 61st IEEE Conference on Decision and Control, 2022

Physics-Guided Neural Networks for Feedforward Control: An Orthogonal Projection-Based Approach.
Proceedings of the American Control Conference, 2022

2021
Projection-based integrators for improved motion control: Formalization, well-posedness and stability of hybrid integrator-gain systems.
Autom., 2021

On Step-and-Scan Trajectories used in Wafer Scanners in Semiconductor Manufacturing.
Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems, 2021

Frequency-Domain Tools for Stability Analysis of Hybrid Integrator-Gain Systems.
Proceedings of the 2021 European Control Conference, 2021

A solution to gain loss in hybrid integrator-gain systems.
Proceedings of the IEEE Conference on Control Technology and Applications, 2021

On Synchronization of Generic Lithography Machine Open-chains using a Novel Fine-Positioning Stage System.
Proceedings of the IEEE Conference on Control Technology and Applications, 2021

On the Equivalence of Extended and Oblique Projected Dynamics with Applications to Hybrid Integrator-Gain Systems.
Proceedings of the 2021 American Control Conference, 2021

Micro-Positioning End-Stage for Precise Multi-Axis Motion Control in Optical Lithography Machines: Preliminary Results.
Proceedings of the 2021 American Control Conference, 2021

Overcoming Performance Limitations of Linear Control with Hybrid Integrator-Gain Systems.
Proceedings of the 7th IFAC Conference on Analysis and Design of Hybrid Systems, 2021

2020
Oblique Projected Dynamical Systems and Incremental Stability Under State Constraints.
IEEE Control. Syst. Lett., 2020

Hybrid Integrator-Gain Systems: A Remedy for Overshoot Limitations in Linear Control?
IEEE Control. Syst. Lett., 2020

Industry engagement with control research: Perspective and messages.
Annu. Rev. Control., 2020

Linear-time-varying feedforward control for position-dependent flexible structures.
Proceedings of the 18th European Control Conference, 2020

Control of Wafer Scanners: Methods and Developments.
Proceedings of the 2020 American Control Conference, 2020

Experimental Demonstration of a Nonlinear PID-Based Control Design Using Multiple Hybrid Integrator-Gain Elements.
Proceedings of the 2020 American Control Conference, 2020

2019
Conformal slip-free wafer chucking using an actuated wafer table.
Proceedings of the 7th International Conference on Control, Mechatronics and Automation, 2019

Extended Projected Dynamical Systems with Applications to Hybrid Integrator-Gain Systems.
Proceedings of the 58th IEEE Conference on Decision and Control, 2019

Hybrid Integral Reset Control with Application to a Lens Motion System.
Proceedings of the 2019 American Control Conference, 2019

Robust Stability and Nonlinear Loop-Shaping Design for Hybrid Integrator-Gain-Based Control Systems.
Proceedings of the 2019 American Control Conference, 2019

2018
Scheduled Controller Design for Systems With Varying Sensor Configurations: A Frequency-Domain Approach.
IEEE Trans. Control. Syst. Technol., 2018

Robust Synchronization of Motion in Wafer Scanners Using Particle Swarm Optimization.
Proceedings of the IEEE Conference on Control Technology and Applications, 2018

A Hybrid Integrator-Gain Based Low-Pass Filter for Nonlinear Motion Control.
Proceedings of the IEEE Conference on Control Technology and Applications, 2018

A Model-Based Inferential Feedforward Approach to deal with Hysteresis in a Motion System.
Proceedings of the 2018 Annual American Control Conference, 2018

Resonant-Dynamics LTV Feedforward for Flexible Motion Systems.
Proceedings of the 2018 Annual American Control Conference, 2018

Experimental Validation of Inversion Techniques for an LPV motion system.
Proceedings of the 2018 Annual American Control Conference, 2018

IO Linearization, Stability, and Control of an Input Non-Affine Thermoelectric System.
Proceedings of the 2018 Annual American Control Conference, 2018

Design and performance tradeoffs in MIMO disturbance feedforward control.
Proceedings of the IEEE 15th International Workshop on Advanced Motion Control, 2018

2017
Frequency-domain tools for stability analysis of reset control systems.
Autom., 2017

A compliance feedforward scheme for a class of LTV motion systems.
Proceedings of the 2017 American Control Conference, 2017

Reference-tracking feedforward control design for linear dynamical systems through signal decomposition.
Proceedings of the 2017 American Control Conference, 2017

Acceleration-snap feedforward scheme for a motion system with viscoelastic tuned-mass-damper.
Proceedings of the 2017 American Control Conference, 2017

Hybrid integrator design for enhanced tracking in motion control.
Proceedings of the 2017 American Control Conference, 2017

Evaluating performance of multivariable vibration isolators: A frequency domain identification approach applied to an industrial AVIS.
Proceedings of the 2017 American Control Conference, 2017

2016
Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System.
IEEE Trans. Control. Syst. Technol., 2016

Exact plant inversion of flexible motion systems with a time-varying state-to-output map.
Proceedings of the 15th European Control Conference, 2016

Second-order reset elements for stage control design.
Proceedings of the 2016 American Control Conference, 2016

Frequency Response Sensitivity model updating using generic parameters.
Proceedings of the 2016 American Control Conference, 2016

Modeling and feedforward compensation of air mounts with internal Helmholtz resonances.
Proceedings of the 2016 American Control Conference, 2016

2015
Synthesis of Variable Gain Integral Controllers for Linear Motion Systems.
IEEE Trans. Control. Syst. Technol., 2015

Common zeros in synchronization of high-precision stage systems.
Proceedings of the IEEE International Conference on Mechatronics, 2015

Multivariable feedback control in stage synchronization.
Proceedings of the American Control Conference, 2015

Design of a variable gain integrator with reset.
Proceedings of the American Control Conference, 2015

Performance trade-offs in disturbance feedforward compensation of active hard-mounted vibration isolators.
Proceedings of the American Control Conference, 2015

Scheduled controller design for systems with two switching sensor configurations: A frequency-domain approach.
Proceedings of the 5th IFAC Conference on Analysis and Design of Hybrid Systems, 2015

Self-tuning disturbance feedforward control with drift prevention for air mount systems.
Proceedings of the 2015 IEEE Conference on Control Applications, 2015

2014
Design of a fractional-order integrator for high-precision stages.
Proceedings of the American Control Conference, 2014

MIMO FIR feedforward design for zero error tracking control.
Proceedings of the American Control Conference, 2014

2013
Switching Control in Vibration Isolation Systems.
IEEE Trans. Control. Syst. Technol., 2013

Model-based piecewise affine variable-gain controller synthesis.
Proceedings of the American Control Conference, 2013

Learning in the synthesis of data-driven variable-gain controllers.
Proceedings of the American Control Conference, 2013

2012
Data-based control tuning in master-slave systems.
Proceedings of the American Control Conference, 2012

Plant enhancements in motion systems by modal control.
Proceedings of the American Control Conference, 2012

2011
Multi-variable iterative tuning of a variable gain controller with application to a scanning stage system.
Proceedings of the American Control Conference, 2011

2009
Performance-Improved Design of N-PID Controlled Motion Systems With Applications to Wafer Stages.
IEEE Trans. Ind. Electron., 2009

Nonlinear Q-filter in the learning of nano-positioning motion systems.
Proceedings of the 10th European Control Conference, 2009

Dynamic decoupling in motion systems using a gradient approximation-based algorithm.
Proceedings of the 48th IEEE Conference on Decision and Control, 2009

Improved noise sensitivity under high-gain feedback in nano-positioning motion systems.
Proceedings of the American Control Conference, 2009

LPV control of an active vibration isolation system.
Proceedings of the American Control Conference, 2009

2008
Performance of convergence-based variable-gain control of optical storage drives.
Autom., 2008

Circle criterion in linear control design.
Proceedings of the American Control Conference, 2008

Data-based feed-forward control in MIMO motion systems.
Proceedings of the American Control Conference, 2008

2007
Frequency domain performance analysis of nonlinearly controlled motion systems.
Proceedings of the 46th IEEE Conference on Decision and Control, 2007

Robustness, Convergence, and Lyapunov Stability of a Nonlinear Iterative Learning Control Applied at a Wafer Scanner.
Proceedings of the American Control Conference, 2007

2006
Experimental frequency-domain analysis of nonlinear controlled optical storage drives.
IEEE Trans. Control. Syst. Technol., 2006

Variable Control Design and its Application to Wafer Scanners.
Proceedings of the 45th IEEE Conference on Decision and Control, 2006

Performance of variable-gain controlled optical storage drives.
Proceedings of the American Control Conference, 2006

2004
Stability and performance of a variable gain controller with application to a dvd storage drive.
Autom., 2004

2003
A nonlinear dynamic filter to improve disturbance rejection in optical storage drives.
Proceedings of the 42nd IEEE Conference on Decision and Control, 2003

2001
Computing periodic solutions for a CD-player with impact using piecewise linear shooting.
Proceedings of the 40th IEEE Conference on Decision and Control, 2001


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