Marc M. J. van de Wal

According to our database1, Marc M. J. van de Wal authored at least 16 papers between 2001 and 2021.

Collaborative distances:
  • Dijkstra number2 of five.
  • Erdős number3 of four.

Timeline

Legend:

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Links

On csauthors.net:

Bibliography

2021
Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation.
IEEE Trans. Control. Syst. Technol., 2021

2020
Sensor and Actuator Placement for Proportional Feedback Control in Advection-Diffusion Equations.
IEEE Control. Syst. Lett., 2020

2019
Optimal actuator shape design with input and state constraints for a wafer heating application.
Proceedings of the 2019 American Control Conference, 2019

2016
Frequency Response Sensitivity model updating using generic parameters.
Proceedings of the 2016 American Control Conference, 2016

2014
Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage.
IEEE Trans. Control. Syst. Technol., 2014

Exploiting additional actuators and sensors for nano-positioning robust motion control.
Proceedings of the American Control Conference, 2014

2013
Enhancing performance through multivariable weighting function design in ℋ- loop-shaping: with application to a motion system.
Proceedings of the American Control Conference, 2013

2012
Next-generation wafer stage motion control: Connecting system identification and robust control.
Proceedings of the American Control Conference, 2012

2010
Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage.
Proceedings of the American Control Conference, 2010

2009
Identification for robust inferential control.
Proceedings of the 48th IEEE Conference on Decision and Control, 2009

2007
Design framework for high-performance optimal sampled-data control with application to a wafer stage.
Int. J. Control, 2007

Aliasing of Resonance Phenomena in Sampled-Data Feedback Control Design: Hazards, Modeling, and a Solution.
Proceedings of the American Control Conference, 2007

2006
Exploiting H∞ Sampled-Data Control Theory for High-Precision Electromechanical Servo Control Design.
Proceedings of the American Control Conference, 2006

2004
Multi-objective H<sub>∞</sub> control applied to a wafer stage model.
Proceedings of the 43rd IEEE Conference on Decision and Control, 2004

2001
A review of methods for input/output selection.
Autom., 2001

Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage.
Proceedings of the 40th IEEE Conference on Decision and Control, 2001


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