Thomas Uhrmann
According to our database1,
Thomas Uhrmann
authored at least 2 papers
between 2013 and 2016.
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Bibliography
2016
Importance of alignment control during permanent bonding and its impact on via-last alignment for high density 3D interconnects.
Proceedings of the 2016 IEEE International 3D Systems Integration Conference, 2016
2013
Proceedings of the 2013 IEEE International 3D Systems Integration Conference (3DIC), 2013